{"id":290685,"date":"2024-10-19T19:43:44","date_gmt":"2024-10-19T19:43:44","guid":{"rendered":"https:\/\/pdfstandards.shop\/product\/uncategorized\/bsi-pd-iso-tr-193192013\/"},"modified":"2024-10-25T16:44:16","modified_gmt":"2024-10-25T16:44:16","slug":"bsi-pd-iso-tr-193192013","status":"publish","type":"product","link":"https:\/\/pdfstandards.shop\/product\/publishers\/bsi\/bsi-pd-iso-tr-193192013\/","title":{"rendered":"BSI PD ISO\/TR 19319:2013"},"content":{"rendered":"
This Technical Report describes:<\/p>\n
Functions and their relevance to lateral resolution:<\/p>\n
Point spread function (PSF) \u2014 see 4.1.1<\/p>\n<\/li>\n
Line spread function (LSF) \u2014 see 4.1.2<\/p>\n<\/li>\n
Edge spread function (ESF) \u2014 see 4.1.3<\/p>\n<\/li>\n
Modulation transfer function (MTF) \u2014 see 4.1.4<\/p>\n<\/li>\n
Contrast transfer function (CTF) \u2014 see 4.1.5.<\/p>\n<\/li>\n<\/ol>\n<\/li>\n
Experimental methods for the determination of lateral resolution and parameters related to lateral resolution:<\/p>\n
Imaging of a narrow stripe \u2014 see 4.2<\/p>\n<\/li>\n
Imaging of a sharp edge \u2014 see 4.3<\/p>\n<\/li>\n
Imaging of square-wave gratings \u2014 see 4.4.<\/p>\n<\/li>\n<\/ol>\n<\/li>\n
Physical factors affecting lateral resolution, analysis area and sample area viewed by the analyser in Auger electron spectroscopy and X-ray photoelectron spectroscopy \u2014 see Clauses 5 and 6.<\/p>\n<\/li>\n<\/ol>\n
PDF Pages<\/th>\n | PDF Title<\/th>\n<\/tr>\n | ||||||
---|---|---|---|---|---|---|---|
6<\/td>\n | Foreword <\/td>\n<\/tr>\n | ||||||
7<\/td>\n | Introduction <\/td>\n<\/tr>\n | ||||||
9<\/td>\n | Section sec_1 Section sec_2 1\tScope 2\tTerms and definitions <\/td>\n<\/tr>\n | ||||||
12<\/td>\n | Section sec_3 3\tSymbols and abbreviated terms <\/td>\n<\/tr>\n | ||||||
15<\/td>\n | Section sec_4 Section sec_4.1 Section sec_4.1.1 4\tDetermination of lateral resolution and sharpness by imaging of stripe patterns 4.1\tTheoretical background <\/td>\n<\/tr>\n | ||||||
16<\/td>\n | Figure fig_1 Figure fig_2 <\/td>\n<\/tr>\n | ||||||
17<\/td>\n | Section sec_4.1.2 Section sec_4.1.3 <\/td>\n<\/tr>\n | ||||||
18<\/td>\n | Figure fig_3 <\/td>\n<\/tr>\n | ||||||
19<\/td>\n | Figure fig_4 Section sec_4.1.4 <\/td>\n<\/tr>\n | ||||||
20<\/td>\n | Figure fig_5 <\/td>\n<\/tr>\n | ||||||
21<\/td>\n | Figure fig_6 <\/td>\n<\/tr>\n | ||||||
22<\/td>\n | Figure fig_7 Section sec_4.1.5 <\/td>\n<\/tr>\n | ||||||
23<\/td>\n | Figure fig_8 <\/td>\n<\/tr>\n | ||||||
24<\/td>\n | Figure fig_9 Section sec_4.1.6 <\/td>\n<\/tr>\n | ||||||
25<\/td>\n | Figure fig_10 Section sec_4.1.7 <\/td>\n<\/tr>\n | ||||||
26<\/td>\n | Table tab_1 <\/td>\n<\/tr>\n | ||||||
27<\/td>\n | Table tab_2 <\/td>\n<\/tr>\n | ||||||
28<\/td>\n | Table tab_3 <\/td>\n<\/tr>\n | ||||||
29<\/td>\n | Section sec_4.2 Section sec_4.2.1 Figure fig_11 4.2\tDetermination of the line spread function and the modulation transfer function by imaging of a narrow stripe <\/td>\n<\/tr>\n | ||||||
30<\/td>\n | Figure fig_12 <\/td>\n<\/tr>\n | ||||||
31<\/td>\n | Figure fig_13 Section sec_4.2.2 Figure fig_14 <\/td>\n<\/tr>\n | ||||||
32<\/td>\n | Figure fig_15 <\/td>\n<\/tr>\n | ||||||
33<\/td>\n | Figure fig_16 Section sec_4.2.3 <\/td>\n<\/tr>\n | ||||||
34<\/td>\n | Figure fig_17 <\/td>\n<\/tr>\n | ||||||
35<\/td>\n | Figure fig_18 <\/td>\n<\/tr>\n | ||||||
36<\/td>\n | Figure fig_19 <\/td>\n<\/tr>\n | ||||||
37<\/td>\n | Figure fig_20 <\/td>\n<\/tr>\n | ||||||
38<\/td>\n | Figure fig_21 Section sec_4.2.4 <\/td>\n<\/tr>\n | ||||||
39<\/td>\n | Figure fig_22 <\/td>\n<\/tr>\n | ||||||
40<\/td>\n | Figure fig_23 <\/td>\n<\/tr>\n | ||||||
41<\/td>\n | Figure fig_24 Section sec_4.2.5 <\/td>\n<\/tr>\n | ||||||
42<\/td>\n | Figure fig_25 <\/td>\n<\/tr>\n | ||||||
43<\/td>\n | Figure fig_26 <\/td>\n<\/tr>\n | ||||||
44<\/td>\n | Figure fig_27 Section sec_4.2.6 <\/td>\n<\/tr>\n | ||||||
46<\/td>\n | Figure fig_28 <\/td>\n<\/tr>\n | ||||||
47<\/td>\n | Figure fig_29 Figure fig_30 <\/td>\n<\/tr>\n | ||||||
49<\/td>\n | Section sec_4.3 4.3\tDetermination of the edge spread function (ESF) by imaging a straight edge <\/td>\n<\/tr>\n | ||||||
50<\/td>\n | Figure fig_31 Section sec_4.3.1 <\/td>\n<\/tr>\n | ||||||
51<\/td>\n | Figure fig_32 Figure fig_33 <\/td>\n<\/tr>\n | ||||||
52<\/td>\n | Figure fig_34 Figure fig_35 Section sec_4.3.2 <\/td>\n<\/tr>\n | ||||||
53<\/td>\n | Figure fig_36 Figure fig_37 <\/td>\n<\/tr>\n | ||||||
54<\/td>\n | Table tab_4 Section sec_4.3.3 <\/td>\n<\/tr>\n | ||||||
55<\/td>\n | Figure fig_38 <\/td>\n<\/tr>\n | ||||||
56<\/td>\n | Figure fig_39 Section sec_4.3.4 <\/td>\n<\/tr>\n | ||||||
57<\/td>\n | Figure fig_40 Section sec_4.3.5 <\/td>\n<\/tr>\n | ||||||
59<\/td>\n | Figure fig_41 <\/td>\n<\/tr>\n | ||||||
61<\/td>\n | Figure fig_42 <\/td>\n<\/tr>\n | ||||||
62<\/td>\n | Figure fig_43 <\/td>\n<\/tr>\n | ||||||
63<\/td>\n | Table tab_5 <\/td>\n<\/tr>\n | ||||||
64<\/td>\n | Section sec_4.4 4.4\tDetermination of lateral resolution by imaging of square-wave gratings <\/td>\n<\/tr>\n | ||||||
65<\/td>\n | Section sec_4.4.1 Section sec_4.4.1.1 Figure fig_44 <\/td>\n<\/tr>\n | ||||||
66<\/td>\n | Section sec_4.4.1.2 Figure fig_45 <\/td>\n<\/tr>\n | ||||||
67<\/td>\n | Section sec_4.4.1.3 Figure fig_46 <\/td>\n<\/tr>\n | ||||||
68<\/td>\n | Figure fig_47 Section sec_4.4.2 <\/td>\n<\/tr>\n | ||||||
69<\/td>\n | Figure fig_48 <\/td>\n<\/tr>\n | ||||||
70<\/td>\n | Figure fig_49 <\/td>\n<\/tr>\n | ||||||
71<\/td>\n | Figure fig_50 <\/td>\n<\/tr>\n | ||||||
72<\/td>\n | Section sec_4.4.2.1 Figure fig_51 <\/td>\n<\/tr>\n | ||||||
73<\/td>\n | Section sec_4.4.2.2 <\/td>\n<\/tr>\n | ||||||
74<\/td>\n | Figure fig_52 <\/td>\n<\/tr>\n | ||||||
75<\/td>\n | Figure fig_53 Figure fig_54 <\/td>\n<\/tr>\n | ||||||
77<\/td>\n | Figure fig_55 Section sec_4.4.2.3 <\/td>\n<\/tr>\n | ||||||
78<\/td>\n | Figure fig_56 <\/td>\n<\/tr>\n | ||||||
79<\/td>\n | Section sec_4.4.2.4 <\/td>\n<\/tr>\n | ||||||
80<\/td>\n | Figure fig_57 <\/td>\n<\/tr>\n | ||||||
81<\/td>\n | Table tab_6 <\/td>\n<\/tr>\n | ||||||
82<\/td>\n | Figure fig_58 Section sec_4.4.3 <\/td>\n<\/tr>\n | ||||||
83<\/td>\n | Section sec_4.4.3.1 Section sec_4.4.3.2 <\/td>\n<\/tr>\n | ||||||
84<\/td>\n | Figure fig_59 <\/td>\n<\/tr>\n | ||||||
85<\/td>\n | Figure fig_60 <\/td>\n<\/tr>\n | ||||||
86<\/td>\n | Table tab_7 <\/td>\n<\/tr>\n | ||||||
87<\/td>\n | Figure fig_61 Section sec_4.4.3.3 <\/td>\n<\/tr>\n | ||||||
89<\/td>\n | Figure fig_62 <\/td>\n<\/tr>\n | ||||||
90<\/td>\n | Section sec_4.4.3.4 <\/td>\n<\/tr>\n | ||||||
91<\/td>\n | Table tab_8 Table tab_9 <\/td>\n<\/tr>\n | ||||||
92<\/td>\n | Figure fig_63 Table tab_10 Section sec_4.4.3.5 <\/td>\n<\/tr>\n | ||||||
93<\/td>\n | Figure fig_64 <\/td>\n<\/tr>\n | ||||||
94<\/td>\n | Figure fig_65 <\/td>\n<\/tr>\n | ||||||
95<\/td>\n | Figure fig_66 Section sec_4.4.4 <\/td>\n<\/tr>\n | ||||||
97<\/td>\n | Figure fig_67 <\/td>\n<\/tr>\n | ||||||
98<\/td>\n | Table tab_11 <\/td>\n<\/tr>\n | ||||||
99<\/td>\n | Figure fig_68 <\/td>\n<\/tr>\n | ||||||
101<\/td>\n | Figure fig_69 <\/td>\n<\/tr>\n | ||||||
102<\/td>\n | Figure fig_70 Section sec_4.4.5 <\/td>\n<\/tr>\n | ||||||
103<\/td>\n | Figure fig_71 <\/td>\n<\/tr>\n | ||||||
104<\/td>\n | Figure fig_72 Section sec_5 Section sec_5.1 5\tPhysical factors affecting lateral resolution, analysis area and sample area viewed by the analyser in AES and XPS 5.1\tGeneral information <\/td>\n<\/tr>\n | ||||||
105<\/td>\n | Section sec_5.2 Section sec_5.2.1 5.2\tLateral resolution of AES and XPS <\/td>\n<\/tr>\n | ||||||
106<\/td>\n | Figure fig_73 <\/td>\n<\/tr>\n | ||||||
107<\/td>\n | Figure fig_74 Figure fig_75 Section sec_5.2.2 <\/td>\n<\/tr>\n | ||||||
108<\/td>\n | Figure fig_76 <\/td>\n<\/tr>\n | ||||||
110<\/td>\n | Figure fig_77 <\/td>\n<\/tr>\n | ||||||
111<\/td>\n | Figure fig_78 Section sec_5.2.3 <\/td>\n<\/tr>\n | ||||||
112<\/td>\n | Section sec_5.3 Section sec_5.3.1 Section sec_5.3.2 Figure fig_79 5.3\tAnalysis area <\/td>\n<\/tr>\n | ||||||
113<\/td>\n | Section sec_5.3.3 <\/td>\n<\/tr>\n | ||||||
114<\/td>\n | Section sec_5.4 5.4\tSample area viewed by the analyser <\/td>\n<\/tr>\n | ||||||
115<\/td>\n | Figure fig_80 Section sec_6 Section sec_6.1 6\tMeasurements of analysis area and sample area viewed by the analyser in AES and XPS 6.1\tGeneral information <\/td>\n<\/tr>\n | ||||||
116<\/td>\n | Section sec_6.2 6.2\tAnalysis area <\/td>\n<\/tr>\n | ||||||
117<\/td>\n | Section sec_6.3 6.3\tSample area viewed by the analyser <\/td>\n<\/tr>\n | ||||||
118<\/td>\n | Annex sec_A Figure fig_A.1 Annex\u00a0A \n(informative)<\/p>\n Reduction of image period for 3-stripe gratings <\/td>\n<\/tr>\n | ||||||
119<\/td>\n | Figure fig_A.2 <\/td>\n<\/tr>\n | ||||||
120<\/td>\n | Table tab_A.1 <\/td>\n<\/tr>\n | ||||||
121<\/td>\n | Reference ref_1 Reference ref_2 Reference ref_3 Reference ref_4 Reference ref_5 Reference ref_6 Reference ref_7 Reference ref_8 Reference ref_9 Reference ref_10 Reference ref_11 Reference ref_12 Reference ref_13 Reference ref_14 Reference ref_15 Reference ref_16 Reference ref_17 Reference ref_18 Reference ref_19 Bibliography <\/td>\n<\/tr>\n | ||||||
122<\/td>\n | Reference ref_20 Reference ref_21 Reference ref_22 Reference ref_23 Reference ref_24 Reference ref_25 Reference ref_26 Reference ref_27 Reference ref_28 Reference ref_29 Reference ref_30 Reference ref_31 Reference ref_32 Reference ref_33 Reference ref_34 Reference ref_35 Reference ref_36 Reference ref_37 Reference ref_38 Reference ref_39 <\/td>\n<\/tr>\n | ||||||
123<\/td>\n | Reference ref_40 Reference ref_41 Reference ref_42 Reference ref_43 Reference ref_44 Reference ref_45 Reference ref_46 Reference ref_47 Reference ref_48 Reference ref_49 Reference ref_50 Reference ref_51 Reference ref_52 Reference ref_53 Reference ref_54 Reference ref_55 Reference ref_56 Reference ref_57 Reference ref_58 Reference ref_59 <\/td>\n<\/tr>\n | ||||||
124<\/td>\n | Reference ref_60 Reference ref_61 Reference ref_62 Reference ref_63 Reference ref_64 Reference ref_65 Reference ref_66 Reference ref_67 Reference ref_68 Reference ref_69 <\/td>\n<\/tr>\n<\/table>\n","protected":false},"excerpt":{"rendered":" Surface chemical analysis. Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods<\/b><\/p>\n |