{"id":290685,"date":"2024-10-19T19:43:44","date_gmt":"2024-10-19T19:43:44","guid":{"rendered":"https:\/\/pdfstandards.shop\/product\/uncategorized\/bsi-pd-iso-tr-193192013\/"},"modified":"2024-10-25T16:44:16","modified_gmt":"2024-10-25T16:44:16","slug":"bsi-pd-iso-tr-193192013","status":"publish","type":"product","link":"https:\/\/pdfstandards.shop\/product\/publishers\/bsi\/bsi-pd-iso-tr-193192013\/","title":{"rendered":"BSI PD ISO\/TR 19319:2013"},"content":{"rendered":"

This Technical Report describes:<\/p>\n

    \n
  1. \n

    Functions and their relevance to lateral resolution:<\/p>\n

      \n
    1. \n

      Point spread function (PSF) \u2014 see 4.1.1<\/p>\n<\/li>\n

    2. \n

      Line spread function (LSF) \u2014 see 4.1.2<\/p>\n<\/li>\n

    3. \n

      Edge spread function (ESF) \u2014 see 4.1.3<\/p>\n<\/li>\n

    4. \n

      Modulation transfer function (MTF) \u2014 see 4.1.4<\/p>\n<\/li>\n

    5. \n

      Contrast transfer function (CTF) \u2014 see 4.1.5.<\/p>\n<\/li>\n<\/ol>\n<\/li>\n

    6. \n

      Experimental methods for the determination of lateral resolution and parameters related to lateral resolution:<\/p>\n

        \n
      1. \n

        Imaging of a narrow stripe \u2014 see 4.2<\/p>\n<\/li>\n

      2. \n

        Imaging of a sharp edge \u2014 see 4.3<\/p>\n<\/li>\n

      3. \n

        Imaging of square-wave gratings \u2014 see 4.4.<\/p>\n<\/li>\n<\/ol>\n<\/li>\n

      4. \n

        Physical factors affecting lateral resolution, analysis area and sample area viewed by the analyser in Auger electron spectroscopy and X-ray photoelectron spectroscopy \u2014 see Clauses 5 and 6.<\/p>\n<\/li>\n<\/ol>\n

        PDF Catalog<\/h4>\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n
        PDF Pages<\/th>\nPDF Title<\/th>\n<\/tr>\n
        6<\/td>\nForeword <\/td>\n<\/tr>\n
        7<\/td>\nIntroduction <\/td>\n<\/tr>\n
        9<\/td>\nSection sec_1
        Section sec_2
        1\tScope
        2\tTerms and definitions <\/td>\n<\/tr>\n
        12<\/td>\nSection sec_3
        3\tSymbols and abbreviated terms <\/td>\n<\/tr>\n
        15<\/td>\nSection sec_4
        Section sec_4.1
        Section sec_4.1.1
        4\tDetermination of lateral resolution and sharpness by imaging of stripe patterns
        4.1\tTheoretical background <\/td>\n<\/tr>\n
        16<\/td>\nFigure fig_1
        Figure fig_2 <\/td>\n<\/tr>\n
        17<\/td>\nSection sec_4.1.2
        Section sec_4.1.3 <\/td>\n<\/tr>\n
        18<\/td>\nFigure fig_3 <\/td>\n<\/tr>\n
        19<\/td>\nFigure fig_4
        Section sec_4.1.4 <\/td>\n<\/tr>\n
        20<\/td>\nFigure fig_5 <\/td>\n<\/tr>\n
        21<\/td>\nFigure fig_6 <\/td>\n<\/tr>\n
        22<\/td>\nFigure fig_7
        Section sec_4.1.5 <\/td>\n<\/tr>\n
        23<\/td>\nFigure fig_8 <\/td>\n<\/tr>\n
        24<\/td>\nFigure fig_9
        Section sec_4.1.6 <\/td>\n<\/tr>\n
        25<\/td>\nFigure fig_10
        Section sec_4.1.7 <\/td>\n<\/tr>\n
        26<\/td>\nTable tab_1 <\/td>\n<\/tr>\n
        27<\/td>\nTable tab_2 <\/td>\n<\/tr>\n
        28<\/td>\nTable tab_3 <\/td>\n<\/tr>\n
        29<\/td>\nSection sec_4.2
        Section sec_4.2.1
        Figure fig_11
        4.2\tDetermination of the line spread function and the modulation transfer function by imaging of a narrow stripe <\/td>\n<\/tr>\n
        30<\/td>\nFigure fig_12 <\/td>\n<\/tr>\n
        31<\/td>\nFigure fig_13
        Section sec_4.2.2
        Figure fig_14 <\/td>\n<\/tr>\n
        32<\/td>\nFigure fig_15 <\/td>\n<\/tr>\n
        33<\/td>\nFigure fig_16
        Section sec_4.2.3 <\/td>\n<\/tr>\n
        34<\/td>\nFigure fig_17 <\/td>\n<\/tr>\n
        35<\/td>\nFigure fig_18 <\/td>\n<\/tr>\n
        36<\/td>\nFigure fig_19 <\/td>\n<\/tr>\n
        37<\/td>\nFigure fig_20 <\/td>\n<\/tr>\n
        38<\/td>\nFigure fig_21
        Section sec_4.2.4 <\/td>\n<\/tr>\n
        39<\/td>\nFigure fig_22 <\/td>\n<\/tr>\n
        40<\/td>\nFigure fig_23 <\/td>\n<\/tr>\n
        41<\/td>\nFigure fig_24
        Section sec_4.2.5 <\/td>\n<\/tr>\n
        42<\/td>\nFigure fig_25 <\/td>\n<\/tr>\n
        43<\/td>\nFigure fig_26 <\/td>\n<\/tr>\n
        44<\/td>\nFigure fig_27
        Section sec_4.2.6 <\/td>\n<\/tr>\n
        46<\/td>\nFigure fig_28 <\/td>\n<\/tr>\n
        47<\/td>\nFigure fig_29
        Figure fig_30 <\/td>\n<\/tr>\n
        49<\/td>\nSection sec_4.3
        4.3\tDetermination of the edge spread function (ESF) by imaging a straight edge <\/td>\n<\/tr>\n
        50<\/td>\nFigure fig_31
        Section sec_4.3.1 <\/td>\n<\/tr>\n
        51<\/td>\nFigure fig_32
        Figure fig_33 <\/td>\n<\/tr>\n
        52<\/td>\nFigure fig_34
        Figure fig_35
        Section sec_4.3.2 <\/td>\n<\/tr>\n
        53<\/td>\nFigure fig_36
        Figure fig_37 <\/td>\n<\/tr>\n
        54<\/td>\nTable tab_4
        Section sec_4.3.3 <\/td>\n<\/tr>\n
        55<\/td>\nFigure fig_38 <\/td>\n<\/tr>\n
        56<\/td>\nFigure fig_39
        Section sec_4.3.4 <\/td>\n<\/tr>\n
        57<\/td>\nFigure fig_40
        Section sec_4.3.5 <\/td>\n<\/tr>\n
        59<\/td>\nFigure fig_41 <\/td>\n<\/tr>\n
        61<\/td>\nFigure fig_42 <\/td>\n<\/tr>\n
        62<\/td>\nFigure fig_43 <\/td>\n<\/tr>\n
        63<\/td>\nTable tab_5 <\/td>\n<\/tr>\n
        64<\/td>\nSection sec_4.4
        4.4\tDetermination of lateral resolution by imaging of square-wave gratings <\/td>\n<\/tr>\n
        65<\/td>\nSection sec_4.4.1
        Section sec_4.4.1.1
        Figure fig_44 <\/td>\n<\/tr>\n
        66<\/td>\nSection sec_4.4.1.2
        Figure fig_45 <\/td>\n<\/tr>\n
        67<\/td>\nSection sec_4.4.1.3
        Figure fig_46 <\/td>\n<\/tr>\n
        68<\/td>\nFigure fig_47
        Section sec_4.4.2 <\/td>\n<\/tr>\n
        69<\/td>\nFigure fig_48 <\/td>\n<\/tr>\n
        70<\/td>\nFigure fig_49 <\/td>\n<\/tr>\n
        71<\/td>\nFigure fig_50 <\/td>\n<\/tr>\n
        72<\/td>\nSection sec_4.4.2.1
        Figure fig_51 <\/td>\n<\/tr>\n
        73<\/td>\nSection sec_4.4.2.2 <\/td>\n<\/tr>\n
        74<\/td>\nFigure fig_52 <\/td>\n<\/tr>\n
        75<\/td>\nFigure fig_53
        Figure fig_54 <\/td>\n<\/tr>\n
        77<\/td>\nFigure fig_55
        Section sec_4.4.2.3 <\/td>\n<\/tr>\n
        78<\/td>\nFigure fig_56 <\/td>\n<\/tr>\n
        79<\/td>\nSection sec_4.4.2.4 <\/td>\n<\/tr>\n
        80<\/td>\nFigure fig_57 <\/td>\n<\/tr>\n
        81<\/td>\nTable tab_6 <\/td>\n<\/tr>\n
        82<\/td>\nFigure fig_58
        Section sec_4.4.3 <\/td>\n<\/tr>\n
        83<\/td>\nSection sec_4.4.3.1
        Section sec_4.4.3.2 <\/td>\n<\/tr>\n
        84<\/td>\nFigure fig_59 <\/td>\n<\/tr>\n
        85<\/td>\nFigure fig_60 <\/td>\n<\/tr>\n
        86<\/td>\nTable tab_7 <\/td>\n<\/tr>\n
        87<\/td>\nFigure fig_61
        Section sec_4.4.3.3 <\/td>\n<\/tr>\n
        89<\/td>\nFigure fig_62 <\/td>\n<\/tr>\n
        90<\/td>\nSection sec_4.4.3.4 <\/td>\n<\/tr>\n
        91<\/td>\nTable tab_8
        Table tab_9 <\/td>\n<\/tr>\n
        92<\/td>\nFigure fig_63
        Table tab_10
        Section sec_4.4.3.5 <\/td>\n<\/tr>\n
        93<\/td>\nFigure fig_64 <\/td>\n<\/tr>\n
        94<\/td>\nFigure fig_65 <\/td>\n<\/tr>\n
        95<\/td>\nFigure fig_66
        Section sec_4.4.4 <\/td>\n<\/tr>\n
        97<\/td>\nFigure fig_67 <\/td>\n<\/tr>\n
        98<\/td>\nTable tab_11 <\/td>\n<\/tr>\n
        99<\/td>\nFigure fig_68 <\/td>\n<\/tr>\n
        101<\/td>\nFigure fig_69 <\/td>\n<\/tr>\n
        102<\/td>\nFigure fig_70
        Section sec_4.4.5 <\/td>\n<\/tr>\n
        103<\/td>\nFigure fig_71 <\/td>\n<\/tr>\n
        104<\/td>\nFigure fig_72
        Section sec_5
        Section sec_5.1
        5\tPhysical factors affecting lateral resolution, analysis area and sample area viewed by the analyser in AES and XPS
        5.1\tGeneral information <\/td>\n<\/tr>\n
        105<\/td>\nSection sec_5.2
        Section sec_5.2.1
        5.2\tLateral resolution of AES and XPS <\/td>\n<\/tr>\n
        106<\/td>\nFigure fig_73 <\/td>\n<\/tr>\n
        107<\/td>\nFigure fig_74
        Figure fig_75
        Section sec_5.2.2 <\/td>\n<\/tr>\n
        108<\/td>\nFigure fig_76 <\/td>\n<\/tr>\n
        110<\/td>\nFigure fig_77 <\/td>\n<\/tr>\n
        111<\/td>\nFigure fig_78
        Section sec_5.2.3 <\/td>\n<\/tr>\n
        112<\/td>\nSection sec_5.3
        Section sec_5.3.1
        Section sec_5.3.2
        Figure fig_79
        5.3\tAnalysis area <\/td>\n<\/tr>\n
        113<\/td>\nSection sec_5.3.3 <\/td>\n<\/tr>\n
        114<\/td>\nSection sec_5.4
        5.4\tSample area viewed by the analyser <\/td>\n<\/tr>\n
        115<\/td>\nFigure fig_80
        Section sec_6
        Section sec_6.1
        6\tMeasurements of analysis area and sample area viewed by the analyser in AES and XPS
        6.1\tGeneral information <\/td>\n<\/tr>\n
        116<\/td>\nSection sec_6.2
        6.2\tAnalysis area <\/td>\n<\/tr>\n
        117<\/td>\nSection sec_6.3
        6.3\tSample area viewed by the analyser <\/td>\n<\/tr>\n
        118<\/td>\nAnnex sec_A
        Figure fig_A.1
        Annex\u00a0A
        \n(informative)<\/p>\n

        Reduction of image period for 3-stripe gratings <\/td>\n<\/tr>\n

        119<\/td>\nFigure fig_A.2 <\/td>\n<\/tr>\n
        120<\/td>\nTable tab_A.1 <\/td>\n<\/tr>\n
        121<\/td>\nReference ref_1
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        Bibliography <\/td>\n<\/tr>\n
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        Reference ref_69 <\/td>\n<\/tr>\n<\/table>\n","protected":false},"excerpt":{"rendered":"

        Surface chemical analysis. Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods<\/b><\/p>\n\n\n\n\n
        Published By<\/td>\nPublication Date<\/td>\nNumber of Pages<\/td>\n<\/tr>\n
        BSI<\/b><\/a><\/td>\n2013<\/td>\n126<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n","protected":false},"featured_media":290692,"template":"","meta":{"rank_math_lock_modified_date":false,"ep_exclude_from_search":false},"product_cat":[1000,2641],"product_tag":[],"class_list":{"0":"post-290685","1":"product","2":"type-product","3":"status-publish","4":"has-post-thumbnail","6":"product_cat-71-040-40","7":"product_cat-bsi","9":"first","10":"instock","11":"sold-individually","12":"shipping-taxable","13":"purchasable","14":"product-type-simple"},"_links":{"self":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product\/290685","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/types\/product"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/media\/290692"}],"wp:attachment":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/media?parent=290685"}],"wp:term":[{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product_cat?post=290685"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product_tag?post=290685"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}