{"id":290244,"date":"2024-10-19T19:41:38","date_gmt":"2024-10-19T19:41:38","guid":{"rendered":"https:\/\/pdfstandards.shop\/product\/uncategorized\/bsi-pd-iso-tr-162682009\/"},"modified":"2024-10-25T16:41:30","modified_gmt":"2024-10-25T16:41:30","slug":"bsi-pd-iso-tr-162682009","status":"publish","type":"product","link":"https:\/\/pdfstandards.shop\/product\/publishers\/bsi\/bsi-pd-iso-tr-162682009\/","title":{"rendered":"BSI PD ISO\/TR 16268:2009"},"content":{"rendered":"<p>This Technical Report specifies a procedure for the certification of the areic dose of an ion-implanted analyte element of atomic number larger than that of silicon retained in a working reference material (WoRM) intended for surface-analytical use. The WoRM is in the form of a polished (or similarly smooth-faced) wafer (also referred to as the host), of uniform composition and nominal diameter 50&nbsp;mm or more, that has been ion-implanted with nominally one isotope of a chemical element (also referred to as the analyte), not already present in the host, to a nominal areic dose normally within the range 10<sup>16<\/sup> atoms\/cm<sup>2<\/sup> to 10<sup>13<\/sup> atoms\/cm<sup>2<\/sup> (i.e. the range of primary interest in semiconductor technology). The areic dose of the ion-implanted analyte retained in the WoRM wafer is certified against the areic dose of the same analyte retained in an ion-implanted silicon wafer having the status of a (preferably certified) secondary reference material (SeRM).<\/p>\n<p>Information is provided on the concept and the procedure for certification of the WoRM. There is also a description of the requirements for the reference materials, the comparative measurements and the actual certification. Supporting information on ion implantation, ion-implantation dosimetry, wavelength-dispersive X-ray fluorescence spectroscopy and non-certified substitutes for unobtainable SeRMs is provided in Annexes&nbsp;A to D. Sources and magnitudes of uncertainties arising in the certification process are detailed in Annex&nbsp;E.<\/p>\n<h4>PDF Catalog<\/h4>\n<table border=\"1px\" class=\"des-table\">\n<tr>\n<th>PDF Pages<\/th>\n<th>PDF Title<\/th>\n<\/tr>\n<tr>\n<td><b>9<b><\/td>\n<td>Scope <br \/> Normative references <br \/> Terms and definitions  <\/td>\n<\/tr>\n<tr>\n<td><b>13<b><\/td>\n<td>Symbols and abbreviated terms  <\/td>\n<\/tr>\n<tr>\n<td><b>14<b><\/td>\n<td>Concept and procedure <br \/> General information  <\/td>\n<\/tr>\n<tr>\n<td><b>16<b><\/td>\n<td>Preparation of the working and transfer reference materials <br \/> Measurement of retained areic dose in the transfer reference <br \/> Compatibility of the working reference material and the surf  <\/td>\n<\/tr>\n<tr>\n<td><b>17<b><\/td>\n<td>Requirements <br \/> Reference materials <br \/> Instrumentation requirements <br \/> Ion implanter <br \/> Wavelength-dispersive X-ray fluorescence spectrometer  <\/td>\n<\/tr>\n<tr>\n<td><b>18<b><\/td>\n<td>Electron microprobe <br \/> Ion-implantation requirements <br \/> Uniformity requirement <br \/> Certification <br \/> Working reference material against the transfer reference ma <br \/> Transfer reference material against the secondary reference   <\/td>\n<\/tr>\n<tr>\n<td><b>19<b><\/td>\n<td>Retained areic dose of the working reference material  <\/td>\n<\/tr>\n<\/table>\n","protected":false},"excerpt":{"rendered":"<p><b>Surface chemical analysis. Proposed procedure for certifying the retained areic dose in a working reference material produced by ion implantation<\/b><\/p>\n<table class=\"shortdes-table\" style=\"width: 100%\" border=\"0\" cellspacing=\"0\" cellpadding=\"0\">\n<tbody>\n<tr>\n<td>Published By<\/td>\n<td>Publication Date<\/td>\n<td>Number of Pages<\/td>\n<\/tr>\n<tr>\n<td><a href=\"https:\/\/pdfstandards.shop\/product-category\/publishers\/bsi\/\"><b>BSI<\/b><\/a><\/td>\n<td>2009<\/td>\n<td>30<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n","protected":false},"featured_media":290249,"template":"","meta":{"rank_math_lock_modified_date":false,"ep_exclude_from_search":false},"product_cat":[999,2641],"product_tag":[],"class_list":{"0":"post-290244","1":"product","2":"type-product","3":"status-publish","4":"has-post-thumbnail","6":"product_cat-71-040-30","7":"product_cat-bsi","9":"first","10":"instock","11":"sold-individually","12":"shipping-taxable","13":"purchasable","14":"product-type-simple"},"_links":{"self":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product\/290244","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/types\/product"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/media\/290249"}],"wp:attachment":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/media?parent=290244"}],"wp:term":[{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product_cat?post=290244"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product_tag?post=290244"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}