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BS ISO 21360-6:2023

BS ISO 21360-6:2023

$102.76

Vacuum technology. Standard methods for measuring vacuum-pump performance – Cryogenic vacuum pumps

Published By Publication Date Number of Pages
BSI 2023 22
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PDF Catalog

PDF Pages PDF Title
2 National foreword
6 Foreword
7 Introduction
9 1 Scope
2 Normative references
3 Terms and definitions
10 4 Symbols
11 5 Test methods
5.1 Test gas
5.2 Measurement of the volume flow rate (pumping speed)
5.2.1 General
5.2.2 Pretreatment procedure
5.2.3 Volume flow rate (pumping speed) measurement by the throughput method
12 5.2.4 Volume flow rate (pumping speed) measurement by the orifice method
5.2.5 Measurement of water vapour volume flow rate (pumping speed)
5.3 Maximum throughput measurement
5.3.1 General
5.3.2 Measurement method
5.3.3 Measurement setup
5.3.4 Measuring procedure
13 5.4 Pumping capacity measurement
5.4.1 General
5.4.2 Measurement setup
5.4.3 Measuring procedure
5.5 Measurement of base pressure cryogenic vacuum pump
5.6 Measurement of cooldown time
5.6.1 General
14 5.6.2 Measurement setup
5.6.3 Measuring procedure
5.7 Measurement of crossover value
5.7.1 General
5.7.2 Measurement setup
16 5.7.3 Measuring procedure
6 Test report
6.1 Content
17 6.2 Report on general information
6.3 Report on pump parameters
6.4 Report on test equipment and conditions
6.5 Report on operational parameters
6.6 Report on pump performance
19 Annex A (informative) The volume flow rate calculation for the water vapour
20 Bibliography

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BS ISO 21360-6:2023
$102.76