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BS ISO 20263:2017:2018 Edition

$198.66

Microbeam analysis. Analytical electron microscopy. Method for the determination of interface position in the cross-sectional image of the layered materials

Published By Publication Date Number of Pages
BSI 2018 54
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This document specifies a procedure for the determination of averaged interface position between two different layered materials recorded in the cross-sectional image of the multi-layered materials. It is not intended to determine the simulated interface of the multi-layered materials expected through the multi-slice simulation (MSS) method. This document is applicable to the cross-sectional images of the multi-layered materials recorded by using a transmission electron microscope (TEM) or a scanning transmission electron microscope (STEM) and the cross-sectional elemental mapping images by using an energy dispersive X-ray spectrometer (EDS) or an electron energy loss spectrometer (EELS). This document is also applicable to the digitized image recorded on an image sensor built into a digital camera, a digital memory set in the PC or an imaging plate and the digitalized image converted from an analogue image recorded on the photographic film by an image scanner.

PDF Catalog

PDF Pages PDF Title
2 National foreword
6 Foreword
7 Introduction
9 1 Scope
2 Normative references
3 Terms, definitions and abbreviated terms
3.1 Terms and definitions
12 3.2 Abbreviated terms
4 Specimen preparation for cross-sectional imaging
4.1 General
13 4.2 Requirements for the cross-sectional specimen
14 5 Determination of an interface position
5.1 General
5.2 Preliminary considerations
5.2.1 Ideal model of an interface
5.2.2 More realistic model of an interface
16 5.2.3 Dealing with intensity fluctuations in the image
6 Detailed procedure for determining the position of the interface
6.1 General
18 6.2 Preparing cross-sectional TEM/STEM image
6.2.1 Preparing digitized Image
19 6.2.2 Displaying the digitized image
6.3 Setting the ROI
6.3.1 General
6.3.2 Classification of image
20 6.3.3 Procedure of setting the ROI
25 6.4 Acquisition of the averaged intensity profile
27 6.5 Moving-averaged processing
28 6.6 Differential processing
29 6.7 Final location of the interface
30 7 Uncertainty
7.1 Uncertainty accumulating from each step of the procedure
7.2 Uncertainty of measurement result on image analysis
32 Annex A (informative) Examples of processing the real TEM/STEM images for three image types
44 Annex B (informative) Two main applications for this method
51 Annex C (informative) Calibration of scale unit: Pixel size calibration
53 Bibliography
BS ISO 20263:2017
$198.66