BS ISO 18114:2021

$86.31

Surface chemical analysis. Secondary-ion mass spectrometry. Determination of relative sensitivity factors from ion-implanted reference materials

Published By	Publication Date	Number of Pages
BSI	2021	14

Guaranteed Safe Checkout

Categories: 71.040.40 - Chemical analysis, BSI

If you have any questions, feel free to reach out to our online customer service team by clicking on the bottom right corner. We’re here to assist you 24/7.
Email:[email protected]

Description

This document specifies a method of determining relative sensitivity factors (RSFs) for secondary-ion mass spectrometry (SIMS) from ion-implanted reference materials.

The method is applicable to specimens in which the matrix is of uniform chemical composition, and in which the peak concentration of the implanted species does not exceed one atomic percent.

PDF Catalog

PDF Pages	PDF Title
2	National foreword
6	Foreword
7	Introduction
9	1 Scope 2 Normative references 3 Terms and definitions 4 Symbols and abbreviated terms
10	5 Principle 6 Apparatus 7 Ion-implanted reference materials 8 Procedure
11	9 Test report
12	Bibliography

Additional information

Status	Definitive
Pages	14
Publication Date	2021-05-18
ISBN	978 0 539 12680 8
Standard Number	BS ISO 18114:2021
Title	Surface chemical analysis. Secondary-ion mass spectrometry. Determination of relative sensitivity factors from ion-implanted reference materials
Identical National Standard Of	ISO 18114
Replaces	BS ISO 18114:2003
Descriptors	Homogeneity, Mass spectrometry, Spectroscopy, Chemical composition, Ions, Secondary, Chemical analysis and testing, Test methods, Surface chemistry
Publisher	BSI
Committee	CII/60
ICS Codes	71.040.40 - Chemical analysis

Preview PDF


PDF Format	Searchable	Printable	Preview Now

BS ISO 18114:2021

PDF Catalog

Related products