BS ISO 14644-12:2018
$102.76
Cleanrooms and associated controlled environments – Specifications for monitoring air cleanliness by nanoscale particle concentration
| Published By | Publication Date | Number of Pages |
| BSI | 2018 | 20 |
This document covers the monitoring of air cleanliness by particles in terms of concentration of airborne nanoscale particles.
For monitoring purposes, only populations of particles with a lower size limit of 0.1 microns (100 nm) or less – “nanoscale” – are considered.
The monitoring given in this document is for use mainly in “operational” states.
NOTE 1 For the purposes of this document, reference is made to “nanoscale particles”, which means all nano-objects having one (nanoplate), two (nanofibre) or three (nanoparticle) dimensions in the nanoscale.
NOTE 2 As a consequence, the specifications for monitoring air cleanliness by nanoscale particle concentration of the cleanroom in operational state also considers process specifics, e.g., used equipment, personnel behaviour, etc.
NOTE 3 Health and safety considerations are excluded from this document.
PDF Catalog
| PDF Pages | PDF Title |
|---|---|
| 2 | National foreword |
| 6 | Foreword |
| 7 | Introduction |
| 9 | 1 Scope 2 Normative references 3 Terms and definitions 3.1 General |
| 10 | 3.2 Size 3.3 Airborne particles |
| 11 | 3.4 Occupancy states 3.5 Measuring apparatus 4 Monitoring 4.1 General 4.2 Principle 4.3 Methods |
| 12 | 5 Test report |
| 13 | Annex A (informative) Reference method for monitoring by condensation particle counting |
| 16 | Annex B (informative) Particle counting efficiency and particle size cutoff |
| 19 | Bibliography |
