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BS EN 62374-1:2010:2011 Edition

$102.76

Semiconductor devices – Time-dependent dielectric breakdown (TDDB) test for inter-metal layers

Published By Publication Date Number of Pages
BSI 2011 20
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This part of IEC 62374 describes a test method, test structure and lifetime estimation method of the time-dependent dielectric breakdown (TDDB) test for inter-metal layers applied in semiconductor devices.

BS EN 62374-1:2010
$102.76