🔥🔥 Don’t Miss Out on Our End of Autumn Sale. If you have any questions, feel free to click the bottom right corner to contact our customer service..

Concat us[email protected]
Shopping Cart

No products in the cart.

🔍
BS EN 62047-21:2014

BS EN 62047-21:2014

$102.76

Semiconductor devices. Micro-electromechanical devices – Test method for Poisson’s ratio of thin film MEMS materials

Published By Publication Date Number of Pages
BSI 2014 18
PDF Format Searchable Printable Preview Now
Guaranteed Safe Checkout
Categories: ,

If you have any questions, feel free to reach out to our online customer service team by clicking on the bottom right corner. We’re here to assist you 24/7.
Email:[email protected]

This part of IEC 62047 specifies the determination of Poisson’s ratio from the test results obtained by the application of uniaxial and biaxial loads to thin-film micro-electromechanical systems (MEMS) materials with lengths and widths less than 10 mm and thicknesses less than 10 μm.

PDF Catalog

PDF Pages PDF Title
6 English
CONTENTS
7 1 Scope
2 Normative references
3 Terms, definitions, symbols and designations
3.1 Terms and definitions
3.2 Symbols and designations
8 4 Test piece
4.1 General
Figures
Figure 1 – Two types of test pieces for the measurement of Poisson’s ratio
Tables
Table 1 – Symbols and designations of a test piece
9 4.2 Shape of the test piece
4.3 Measurement of dimensions
5 Testing method and test apparatus
5.1 Test principle
5.2 Test machine
5.3 Test procedure
10 5.4 Test environment
6 Test report
11 Annex A (informative) Measurement example of Poisson’s ratio using type 1 test piece
A.1 Fabrication of the test piece
A.2 Dimensions of the test piece
A.3 Test procedures
Figure A.1 – Optical images of markers for strain measurement by DIC
12 A.4 Test results
Figure A.2 – Graphs of load and strain in the longitudinal and transverse directions
13 Annex B (informative) Analysis of test results obtained from a type 2 test piece
B.1 General
B.2 Evaluation of stress and strain in circular and rectangular membranes
14 B.3 Evaluation of Poisson’s ratio
15 Bibliography

Related products

BS EN 62047-21:2014
$102.76