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BS EN 62047-1:2016

BS EN 62047-1:2016

$167.15

Semiconductor devices. Micro-electromechanical devices – Terms and definitions

Published By Publication Date Number of Pages
BSI 2016 38
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IEC 62047-1:2016 defines terms for micro-electromechanical devices including the process of production of such devices. This edition includes the following significant technical changes with respect to the previous edition: a) removal of ten terms; b) revision of twelve terms; c) addition of sixteen new terms.

BS EN 62047-1:2016
$167.15