ASTM-F615M:2002 Edition

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F615M-95(2002) Standard Practice for Determining Safe Current Pulse-Operating Regions for Metallization on Semiconductor Components [Metric]

Published By	Publication Date	Number of Pages
ASTM	2002	5

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Category: ASTM

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Description

ASTM F615M-95-Reapproved2002

Historical Standard: Standard Practice for Determining Safe Current Pulse-Operating Regions for Metallization on Semiconductor Components [Metric]

ASTM F615M

Scope

1.1 This practice covers procedures for determining operating regions that are safe from metallization burnout induced by current pulses of less than 1-s duration.

Note 1—In this practice, “metallization” refers to metallic layers on semiconductor components such as interconnect patterns on integrated circuits. The principles of the practice may, however, be extended to nearly any current-carrying path. The term “burnout” refers to either fusing or vaporization.

1.2 This practice is based on the application of unipolar rectangular current test pulses. An extrapolation technique is specified for mapping safe operating regions in the pulse-amplitude versus pulse-duration plane. A procedure is provided in Appendix X2 to relate safe operating regions established from rectangular pulse data to safe operating regions for arbitrary pulse shapes.

1.3 This practice is not intended to apply to metallization damage mechanisms other than fusing or vaporization induced by current pulses and, in particular, is not intended to apply to long-term mechanisms, such as metal migration.

1.4 This practice is not intended to determine the nature of any defect causing failure.

1.5 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

Keywords

current pulse; current pulse burnout; metallization burnout; safe current pulse; semiconductor burnout

ICS Code

ICS Number Code n/a

DOI: 10.1520/F0615M-95R02

PDF Catalog

PDF Pages	PDF Title
1	Scope Terminology Summary of Practice Significance and Use
2	Interferences Apparatus FIG. 1
3	Sampling Test Specimen Procedure Calculation and Interpretation of Results Report Keywords FIG. 2 FIG. 3
4	X1. METALLIZATION BURNOUT MECHANISMS X1.1 Scope X1.2 Equations of Resistive Heating X1.3 Calculation of Adiabatic Time Dependence for Melting in Aluminum X1.4 Discussion of General Time Dependence
5	X2. EXTENSION OF RECTANGULAR CURRENT PULSE DATA TO THE ANALYSIS OF ARBITRARY CURRENT PULSE DATA FOR CAUSING METALLIZATION BURNOUT X2.1

Additional information

Standard Title	F615M-95(2002) Standard Practice for Determining Safe Current Pulse-Operating Regions for Metallization on Semiconductor Components [Metric]
Published Code	ASTM
Publication Date	2002
Pages Count	5