🔥🔥 Don’t Miss Out on Our End of Autumn Sale. If you have any questions, feel free to click the bottom right corner to contact our customer service..

Concat us[email protected]
Shopping Cart

No products in the cart.

🔍
ASTM-F1152:2001 Edition

ASTM-F1152:2001 Edition

$35.75

F1152-93(2001) Standard Test Method for Dimensions of Notches on Silicon Wafers

Published By Publication Date Number of Pages
ASTM 2001 3
PDF Format Searchable Printable Preview Now
Guaranteed Safe Checkout
Category:

If you have any questions, feel free to reach out to our online customer service team by clicking on the bottom right corner. We’re here to assist you 24/7.
Email:[email protected]

ASTM F1152-93-Reapproved2001

Historical Standard: Standard Test Method for Dimensions of Notches on Silicon Wafers

ASTM F1152

Scope

1.1 This test method covers a nondestructive procedure to determine whether or not the dimensions of fiducial notches on silicon wafers fall within specified limits.

1.2 The values stated in SI units are to be regarded as the standard. The values given in parentheses are for information only.

1.3 This standard does not purport to address all of the safety problems, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

Keywords

notch; notch dimension; optical comparator; silicon; wafer

ICS Code

ICS Number Code 29.045 (Semiconducting materials)

DOI: 10.1520/F1152-93R01

Related products

ASTM-F1152
$35.75