{"id":573396,"date":"2024-11-05T19:38:08","date_gmt":"2024-11-05T19:38:08","guid":{"rendered":"https:\/\/pdfstandards.shop\/product\/uncategorized\/iec-62047-262016\/"},"modified":"2024-11-05T19:38:08","modified_gmt":"2024-11-05T19:38:08","slug":"iec-62047-262016","status":"publish","type":"product","link":"https:\/\/pdfstandards.shop\/product\/publishers\/iec\/iec-62047-262016\/","title":{"rendered":"IEC 62047-26:2016"},"content":{"rendered":"<p>IEC 62047-26:2016 specifies descriptions of trench structure and needle structure in a micrometer scale. In addition, it provides examples of measurement for the geometry of both structures. For trench structures, this standard applies to structures with a depth of 1 \u00b5m to 100 \u00b5m; walls and trenches with respective widths of 5 \u00b5m to 150 \u00b5m; and aspect ratio of 0,006 7 to 20. For needle structures, the standard applies to structures with three or four faces with a height, horizontal width and vertical width of 2 \u00b5m or larger, and with dimensions that fit inside a cube with sides of 100 \u00b5m. This standard is applicable to the structural design of MEMS and geometrical evaluation after MEMS processes.<\/p>\n","protected":false},"excerpt":{"rendered":"<p><b>Semiconductor devices &#8211; Micro-electromechanical devices &#8211; Part 26: Description and measurement methods for micro trench and needle structures<\/b><\/p>\n<table style=\"width: 100%\" border=\"0\" cellspacing=\"0\" cellpadding=\"0\">\n<tbody>\n<tr>\n<td>Published By<\/td>\n<td>Publication Date<\/td>\n<td>Number of Pages<\/td>\n<\/tr>\n<tr>\n<td><a href=\"https:\/\/pdfstandards.shop\/product-category\/publishers\/iec\/\"><b>IEC<\/b><\/a><\/td>\n<td>2016-01-07<\/td>\n<td>62<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n","protected":false},"featured_media":573410,"template":"","meta":{"rank_math_lock_modified_date":false,"ep_exclude_from_search":false},"product_cat":[577,2636],"product_tag":[],"class_list":{"0":"post-573396","1":"product","2":"type-product","3":"status-publish","4":"has-post-thumbnail","6":"product_cat-31-080-99","7":"product_cat-iec","9":"first","10":"instock","11":"sold-individually","12":"shipping-taxable","13":"purchasable","14":"product-type-simple"},"_links":{"self":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product\/573396","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/types\/product"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/media\/573410"}],"wp:attachment":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/media?parent=573396"}],"wp:term":[{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product_cat?post=573396"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product_tag?post=573396"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}