This document specifies a procedure for the determination of averaged interface position between two different layered materials recorded in the cross-sectional image of the multi-layered materials. It is not intended to determine the simulated interface of the multi-layered materials expected through the multi-slice simulation (MSS) method. This document is applicable to the cross-sectional images of the multi-layered materials recorded by using a transmission electron microscope (TEM) or a scanning transmission electron microscope (STEM) and the cross-sectional elemental mapping images by using an energy dispersive X-ray spectrometer (EDS) or an electron energy loss spectrometer (EELS). This document is also applicable to the digitized image recorded on an image sensor built into a digital camera, a digital memory set in the PC or an imaging plate and the digitalized image converted from an analogue image recorded on the photographic film by an image scanner.<\/p>\n
| PDF Pages<\/th>\n | PDF Title<\/th>\n<\/tr>\n | ||||||
|---|---|---|---|---|---|---|---|
| 2<\/td>\n | National foreword <\/td>\n<\/tr>\n | ||||||
| 6<\/td>\n | Foreword <\/td>\n<\/tr>\n | ||||||
| 7<\/td>\n | Introduction <\/td>\n<\/tr>\n | ||||||
| 9<\/td>\n | 1 Scope 2 Normative references 3 Terms, definitions and abbreviated terms 3.1 Terms and definitions <\/td>\n<\/tr>\n | ||||||
| 12<\/td>\n | 3.2 Abbreviated terms 4 Specimen preparation for cross-sectional imaging 4.1 General <\/td>\n<\/tr>\n | ||||||
| 13<\/td>\n | 4.2 Requirements for the cross-sectional specimen <\/td>\n<\/tr>\n | ||||||
| 14<\/td>\n | 5 Determination of an interface position 5.1 General 5.2 Preliminary considerations 5.2.1 Ideal model of an interface 5.2.2 More realistic model of an interface <\/td>\n<\/tr>\n | ||||||
| 16<\/td>\n | 5.2.3 Dealing with intensity fluctuations in the image 6 Detailed procedure for determining the position of the interface 6.1 General <\/td>\n<\/tr>\n | ||||||
| 18<\/td>\n | 6.2 Preparing cross-sectional TEM\/STEM image 6.2.1 Preparing digitized Image <\/td>\n<\/tr>\n | ||||||
| 19<\/td>\n | 6.2.2 Displaying the digitized image 6.3 Setting the ROI 6.3.1 General 6.3.2 Classification of image <\/td>\n<\/tr>\n | ||||||
| 20<\/td>\n | 6.3.3 Procedure of setting the ROI <\/td>\n<\/tr>\n | ||||||
| 25<\/td>\n | 6.4 Acquisition of the averaged intensity profile <\/td>\n<\/tr>\n | ||||||
| 27<\/td>\n | 6.5 Moving-averaged processing <\/td>\n<\/tr>\n | ||||||
| 28<\/td>\n | 6.6 Differential processing <\/td>\n<\/tr>\n | ||||||
| 29<\/td>\n | 6.7 Final location of the interface <\/td>\n<\/tr>\n | ||||||
| 30<\/td>\n | 7 Uncertainty 7.1 Uncertainty accumulating from each step of the procedure 7.2 Uncertainty of measurement result on image analysis <\/td>\n<\/tr>\n | ||||||
| 32<\/td>\n | Annex A (informative) Examples of processing the real TEM\/STEM images for three image types <\/td>\n<\/tr>\n | ||||||
| 44<\/td>\n | Annex B (informative) Two main applications for this method <\/td>\n<\/tr>\n | ||||||
| 51<\/td>\n | Annex C (informative) Calibration of scale unit: Pixel size calibration <\/td>\n<\/tr>\n | ||||||
| 53<\/td>\n | Bibliography <\/td>\n<\/tr>\n<\/table>\n","protected":false},"excerpt":{"rendered":" Microbeam analysis. Analytical electron microscopy. Method for the determination of interface position in the cross-sectional image of the layered materials<\/b><\/p>\n |